Nanofabrication with a Novel EB System with a Large and Stable Beam Current.

YOSHIMURA T; OHTA H; YAMAMOTO J; UCHINO S; GOTOH Y; TERASAWA T

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J-GLOBAL ID：200902121940237983 Reference number：97A0262617

Nanofabrication with a Novel EB System with a Large and Stable Beam Current.

安定な大ビーム電流を使う新しいEB系によるナノ製作

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Material：
Volume： 35 Issue： 12B Page： 6421-6425 Publication year： Dec. 1996
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices

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YOSHIMURA, T. Jpn.J.Appl.Phys. 1993, 32, 6065
SHIRAISHI, H. J.Vac.Sci.Technol. 1994, B12, 3895

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