Imprint Characteristics by Photo-Induced Solidification of Liquid Polymer.

KOMURO M; TANIGUCHI J; INOUE S; KIMURA N; TOKANO Y; HIROSHIMA H; MATSUI S

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J-GLOBAL ID：200902129986884356 Reference number：01A0212545

Imprint Characteristics by Photo-Induced Solidification of Liquid Polymer.

液体高分子の光誘起凝固によるインプリント特性

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Material：
Volume： 39 Issue： 12B Page： 7075-7079 Publication year： Dec. 30, 2000
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices , Other reactions of polymer

Reference (13)：

1) S. Y. Chou, P. R. Krauss and P. J. Renstrom: Appl. Phys. Lett. 67 (1995) 3114.
2) S. Y. Chou, P. R. Krauss and P. J. Renstrom: J. Vac. Sci. & Technol. B14 (1996) 4129.
3) S. L. Xiaoyun, W. Z. Zhuang and S. Y. Chou: J. Vac. Sci. & Technol. B16 (1998) 3922.
4) L. Guo, P. R. Kraus and S. Y. Chou: Appl. Phys. Lett. 71 (1997) 1881.
5) P. R. Krauss and S. Y. Chou: J. Vac. Sci. & Technol. B13 (1995) 2850.

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