Art
J-GLOBAL ID：200902132385990621
Reference number：00A0912459
Micro-structure Transformation of Silicon. A Newly Developed Transformation Technology for Patterning Silicon Surfaces using the Surface Migration of Silicon Atoms by Hydrogen Annealing.
シリコンのミクロ構造変態 水素アニーリングによるシリコン原子の表面マイグレーションを利用したシリコン表面パターン形成のための新たに開発した変態技術
-
Publisher site
Copy service
{{ this.onShowCLink("http://jdream3.com/copy/?sid=JGLOBAL&noSystem=1&documentNoArray=00A0912459©=1") }}
-
Access JDreamⅢ for advanced search and analysis.
{{ this.onShowJLink("http://jdream3.com/lp/jglobal/index.html?docNo=00A0912459&from=J-GLOBAL&jstjournalNo=G0520B") }}
Author (4)：
,
,
,
Material：
Volume：
39
Issue：
9A
Page：
5033-5038
Publication year：
Sep. 15, 2000
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
,...
JST classification (2)：
JST classification
Category name(code) classified by JST.
Techniques for samples
, Manufacturing technology of solid-state devices
Terms in the title (9)：
Terms in the title
Keywords automatically extracted from the title.
,
,
,
,
,
,
,
,
Return to Previous Page
