Art
J-GLOBAL ID：200902148462186567   Reference number：98A0057082

Growth of p-type Zinc Oxide Films by Chemical Vapor Deposition.

化学蒸着によるp型酸化亜鉛の成長
Author (6)：
MINEGISHI K

About MINEGISHI K

(Yamanashi Univ., Kofu, JPN)

About Yamanashi Univ., Kofu, JPN

, 
KOIWAI Y

About KOIWAI Y

(Yamanashi Univ., Kofu, JPN)

About Yamanashi Univ., Kofu, JPN

, 
KIKUCHI Y

About KIKUCHI Y

(Yamanashi Univ., Kofu, JPN)

About Yamanashi Univ., Kofu, JPN

, 
YANO K

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(Yamanashi Univ., Kofu, JPN)

About Yamanashi Univ., Kofu, JPN

, 
KASUGA M

About KASUGA M

(Yamanashi Univ., Kofu, JPN)

About Yamanashi Univ., Kofu, JPN

, 
SHIMIZU A

About SHIMIZU A

(Yamanashi Univ., Kofu, JPN)

About Yamanashi Univ., Kofu, JPN


Material：
Japanese Journal of Applied Physics. Part 2. Letters  (Japanese Journal of Applied Physics. Part 2. Letters & Express Letters)

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Volume： 36  Issue： 11A  Page： L1453-L1455  Publication year： Nov. 01, 1997 
JST Material Number： F0599B  ISSN： 0021-4922  Document type： Article
Article type： 短報  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
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*chemical vapor deposition

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,...
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JST classification (1)：
JST classification
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Semiconductor thin films 
(BK14040E)

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Terms in the title (3)：
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化学蒸着

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, 
酸化亜鉛

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, 
成長

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