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J-GLOBAL ID:200902149320168282   Reference number:98A0780407

Computer numerically controlled plasma chemical vaporization machining with a pipe electrode for optical fabrication.

光学部品製造のためのパイプ電極による計算機数値制御プラズマ化学蒸着加工
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Volume: 37  Issue: 22  Page: 5198-5210  Publication year: Aug. 01, 1998 
JST Material Number: B0026B  ISSN: 1559-128X  CODEN: APOPAI  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Optical instrument elements and their materials 
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