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J-GLOBAL ID：200902152842705130
Reference number：97A0898013
Convergent Beam Electron Diffraction Measurement for Local Strain Distribution in Si around a NiSi2 Island.
NiSi2島周囲におけるSi中の局在歪分布の収束ビーム電子回折測定
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Author (3)：
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Material：
Volume：
36
Issue：
8
Page：
5072-5078
Publication year：
Aug. 1997
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Surface structure of semiconductors
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