Art
J-GLOBAL ID：200902159014745948   Reference number：97A0400502

The charge effects in the low-energy ion depositing processes.

低エネルギーイオン蒸着過程における電荷効果
Author (3)：
KIUCHI M

About KIUCHI M

(Osaka National Res. Inst., Osaka, JPN)

About Osaka National Res. Inst., Osaka, JPN

, 
TAKEUCHI T

About TAKEUCHI T

(Nara Women’s Univ., Nara, JPN)

About Nara Women’s Univ., Nara, JPN

, 
YAMAMOTO M

About YAMAMOTO M

(Nara Women’s Univ., Nara, JPN)

About Nara Women’s Univ., Nara, JPN


Material：
Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms  (Nuclear Instruments and Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms)

About Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms


Volume： 121  Issue： 1/4  Page： 154-156  Publication year： Jan. 1997 
JST Material Number： H0899A  ISSN： 0168-583X  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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ion beam deposition

About ion beam deposition

,...
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Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
graphite

About graphite


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JST classification (1)：
JST classification
Category name(code) classified by JST.
Interactions with ions 
(BK16070Z)

About Interactions with ions

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
低エネルギーイオン

About 低エネルギーイオン

, 
蒸着過程

About 蒸着過程

, 
電荷

About 電荷


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