About SHIRAI M
About Osaka Prefecture Univ., Osaka, JPN
About SHINOZUKA T
About Osaka Prefecture Univ., Osaka, JPN
About OKAMURA H
About Osaka Prefecture Univ., Osaka, JPN
About TSUNOOKA M
About Osaka Prefecture Univ., Osaka, JPN
About KISHIMURA S
About Matsushita Electric Industrial Co., Ltd., Kyoto, JPN
About ENDO M
About Matsushita Electric Industrial Co., Ltd., Kyoto, JPN
About SASAGO M
About Matsushita Electric Industrial Co., Ltd., Kyoto, JPN
About Journal of Photopolymer Science and Technology
About fluorine-containing polymer
About ポジティブ型レジスト
About Manufacturing technology of solid-state devices
About Methacrylonitrile
About α-Methyl-4-tert-butylstyrene
About α-Methyl-3,5-difluoro-4-tert-butoxycarbonyloxystyrene
About α,α-Bis(trifluoromethyl)-4-isopropenylbenzyl alcohol
About Carbonic acid tert-butyl=α,α-bis(trifluoromethyl)-4-isopropenylbenzyl ester
About Hexamethyldisilazane
About α-メチルスチレン
About 重合体
About 単層
About 二層
About レジスト