Art
J-GLOBAL ID：200902162005302031
Reference number：95A0658438
Properties of transparent zinc-stannate conducting films prepared by radio frequency magnetron sputtering.
高周波マグネトロンスパッタリングにより作製した透明すず酸亜鉛導電性膜の性質
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Author (4)：
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Material：
Volume：
13
Issue：
3 Pt 1
Page：
1095-1099
Publication year：
May. 1995
JST Material Number：
C0789B
ISSN：
0734-2101
CODEN：
JVTAD6
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Oxide thin films
, Electric conduction in amorphous and liquid semiconductors
Terms in the title (5)：
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