Fabrication of Si field emitter arrays integrated with metal-oxide-semiconductor field-effect transistor driving circuits.

NAGAO M; TAMURA Y; MATSUKAWA T; KANEMARU S; ITOH J; TOKUNAGA K

Art

J-GLOBAL ID：200902163725475789 Reference number：03A0069756

Fabrication of Si field emitter arrays integrated with metal-oxide-semiconductor field-effect transistor driving circuits.

金属-酸化物-半導体電界効果トランジスタ駆動回路と共に集積したSi電界放出アレイの作製

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Material：
Volume： 20 Issue： 6 Page： 2309-2313 Publication year： Nov. 2002
JST Material Number： E0974A ISSN： 1071-1023 CODEN： JVTBD9 Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Semiconductor integrated circuit , Thermoionic emission and field emission

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