Art
J-GLOBAL ID：200902165433048734   Reference number：02A0795013

Fabrication Process of SMA Thin Film Based Micro Breaker.

SMA薄膜利用マイクロブレーカの作製プロセス
Author (4)：
IKEDA T

About IKEDA T

(Oita Industrial Res. Inst., Oita, JPN)

About Oita Industrial Res. Inst., Oita, JPN

, 
SUGIYAMA Y

About SUGIYAMA Y

(Oita Industrial Res. Inst., Oita, JPN)

About Oita Industrial Res. Inst., Oita, JPN

, 
OKADA M

About OKADA M

(Shimada Electron Manufacturing Corp., Oita, JPN)

About Shimada Electron Manufacturing Corp., Oita, JPN

, 
FUJIMOTO K

About FUJIMOTO K

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN


Material：
Proceedings of the Sensor Symposium on Sensors, Micromachines, and Applied Systems  (Proceedings of the Sensor Symposium)

About Proceedings of the Sensor Symposium on Sensors, Micromachines, and Applied Systems


Volume： 19th  Page： 267-270  Publication year： May. 30, 2002 
JST Material Number： X0768A  Document type： Proceedings
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
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shape memory effect

About shape memory effect

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Relays and switches 
(NA05060K)

About Relays and switches

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
SMA

About SMA

, 
薄膜

About 薄膜

, 
ブレーカ

About ブレーカ

, 
作製

About 作製

, 
プロセス

About プロセス


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