Art

J-GLOBAL ID：200902166286614113   Reference number：99A0999515

Microstructure and Electrical Properties of Lead Zirconate Titanate (Pb(Zr₅₂/Ti₄₈)O₃) Thick Films Deposited by Aerosol Deposition Method.

アエロゾル堆積法によるジルコニウムチタン酸鉛(Pb(Zr_0.52Ti_o.48)O₃)厚膜の微構造と電気特性

Author (2)： AKEDO J (Agency of Industrial Sci. and Technol., Ministry International Trade and Ind., Ibaraki, JPN) ,  LEBEDEV M (Agency of Industrial Sci. and Technol., Ministry International Trade and Ind., Ibaraki, JPN)
Material： Japanese Journal of Applied Physics. Part 1. Regular Papers, Short Notes & Review Papers  (Japanese Journal of Applied Physics. Part 1. Regular Papers, Brief Communications & Review Papers)
Volume： 38  Issue： 9B  Page： 5397-5401  Publication year： Sep. 30, 1999 
JST Material Number： G0520B  ISSN： 0021-4922  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *ferroelectrics ,...
Semi thesaurus term： *PZT

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JST classification (2)： Ferroelectrics,antiferroelectrics and ferroelasticity  (BM05030B) ,  Oxide thin films  (BK14050P)

Reference (16)：

• 1) J. Akedo: Oyo Buturi 68 (1999) 44 [in Japanese].
• 2) S. Kasyu, E. Fuchita, T. Manabe and C. Hayashi: Jpn. J. Appl. Phys. 23 (1984) L910.
• 3) J. Akedo, M. Ichiki and R. Maeda: Proc. Int. Conf. ECAPD `98, Montreux, Switzerland, Aug. 24-27, 1998, Ferroelectrics 224 (1999) 759.
• 4) A. Schroth, R. Maeda, J. Akedo and M. Ichiki: Jpn. J. Appl. Phys. 37 (1998) 5342.
• 5) J. Akedo, N. Minami, K. Fukuda, M. Ichiki and R, Maeda: Proc. Int. Conf. AFM-2, Singapore, Dec. 7-11 (1998), to be published in Ferroelectrics.

Terms in the title (8)： アエロゾル ,  堆積 ,  ジルコニウム ,  チタン酸鉛 ,  Pb ,  O3 ,  厚膜 ,  電気特性