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J-GLOBAL ID:200902183551153915   Reference number:99A0772543

Effect of Oxygen Component in Magneto-Active Microwave CH4/He Plasma on Large-Area Diamond Nucleation over Si.

Si上の大面積ダイヤモンド核形成に対する磁気活性マイクロ波CH4/Heプラズマ中の酸素成分の効果
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Volume: 38  Issue: 7B  Page: 4500-4503  Publication year: Jul. 30, 1999 
JST Material Number: G0520B  ISSN: 0021-4922  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Techniques and equipment of thin film deposition 
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