Effects of Gas Flow on Particle Growth in Silane RF Discharges.

MATSUOKA Y; SHIRATANI M; FUKUZAWA T; WATANABE Y; KIM K-S

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J-GLOBAL ID：200902187181014983 Reference number：99A0772555

Effects of Gas Flow on Particle Growth in Silane RF Discharges.

シランRF放電中で粒子成長に気体流が及ぼす効果

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Material：
Volume： 38 Issue： 7B Page： 4556-4560 Publication year： Jul. 30, 1999
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Applications of plasma , Manufacturing technology of solid-state devices

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