Characteristics of Films Deposited by New LPCVD Using Lamp Heating. Electrical Characteristics of Polysilicon Film Deposited and the Trial Production of Comb Motor.

UEDA TETSUO; KURIBAYASHI KATSUTOSHI; HASEGAWA SATORU

Art

J-GLOBAL ID：200902191055725510 Reference number：00A0857090

Characteristics of Films Deposited by New LPCVD Using Lamp Heating. Electrical Characteristics of Polysilicon Film Deposited and the Trial Production of Comb Motor.

マイクロマシン用ランプ加熱型減圧CVDの成膜特性研究ポリシリコン膜の電気的特性とくし歯型モータの試作

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Material：
Volume： 66 Issue： 9 Page： 1421-1425 Publication year： Sep. 05, 2000
JST Material Number： F0268A ISSN： 0912-0289 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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