Ar Ion Effect on Mechanical Properties of Carbon Nitride Films Prepared by Ion-Beam-Assisted Deposition.

OHTA H; MATSUMURO A; TAKAHASHI Y

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J-GLOBAL ID：200902194673382259 Reference number：03A0076221

Ar Ion Effect on Mechanical Properties of Carbon Nitride Films Prepared by Ion-Beam-Assisted Deposition.

イオンビーム支援蒸着によって作製した窒化炭素薄膜の機械的性質に及ぼすArイオンの効果

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Material：
Volume： 41 Issue： 12 Page： 7455-7461 Publication year： Dec. 15, 2002
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Thin films of other inorganic compounds , Mechanical properties of solids in general , Irradiational changes of other materials

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