Art
J-GLOBAL ID：200902194673382259   Reference number：03A0076221

Ar Ion Effect on Mechanical Properties of Carbon Nitride Films Prepared by Ion-Beam-Assisted Deposition.

イオンビーム支援蒸着によって作製した窒化炭素薄膜の機械的性質に及ぼすArイオンの効果
Author (3)：
OHTA H

About OHTA H

(Graduate school of Nagoya Univ., Nagoya, JPN)

About Graduate school of Nagoya Univ., Nagoya, JPN

, 
MATSUMURO A

About MATSUMURO A

(Nagoya Univ., Nagoya, JPN)

About Nagoya Univ., Nagoya, JPN

, 
TAKAHASHI Y

About TAKAHASHI Y

(Mie Univ., Tsu, JPN)

About Mie Univ., Tsu, JPN


Material：
Japanese Journal of Applied Physics. Part 1. Regular Papers, Short Notes & Review Papers  (Japanese Journal of Applied Physics. Part 1. Regular Papers, Brief Communications & Review Papers)

About Japanese Journal of Applied Physics. Part 1. Regular Papers, Short Notes & Review Papers


Volume： 41  Issue： 12  Page： 7455-7461  Publication year： Dec. 15, 2002 
JST Material Number： G0520B  ISSN： 0021-4922  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
nitride

About nitride

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
窒化炭素

About 窒化炭素

,...
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JST classification (3)：
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

,  Mechanical properties of solids in general 
(BL01021C)

About Mechanical properties of solids in general

,  Irradiational changes of other materials 
(BK16124V)

About Irradiational changes of other materials

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
イオンビーム支援蒸着

About イオンビーム支援蒸着

, 
作製

About 作製

, 
窒化

About 窒化

, 
炭素薄膜

About 炭素薄膜

, 
機械的性質

About 機械的性質

, 
Arイオン

About Arイオン


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