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J-GLOBAL ID：200902222419481496   Reference number：06A0502542

Theoretical RCI Simulation for Spectra Emitted from Sn and Xe Ions as an EUV Light Source

EUV光源としてのSn及びXeイオンから放射されたスペクトルの理論RCIシミュレーション
Author (4)：
KAGAWA Takashi

About KAGAWA Takashi

(Nara Women’s Univ., Nara, JPN)

About Nara Women’s Univ., Nara, JPN

, 
NISHIHARA Katsunobu

About NISHIHARA Katsunobu

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN

, 
SASAKI Akira

About SASAKI Akira

(JAERI, Kyoto, JPN)

About JAERI, Kyoto, JPN

, 
KOIKE Fumihiro

About KOIKE Fumihiro

(Kitasato Univ., Sagamihara, JPN)

About Kitasato Univ., Sagamihara, JPN


Material：
Journal of Plasma and Fusion Research Series  (J Plasma Fusion Res Ser)

About Journal of Plasma and Fusion Research Series


Volume： 7  Page： 245-248  Publication year： 2006 
JST Material Number： L4349A  Document type： Proceedings
Article type： 短報  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
Thesaurus term：
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Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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*lithography

About lithography

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Visible and ultraviolet spectra 
(BH03030Y)

About Visible and ultraviolet spectra

Terms in the title (8)：
Terms in the title
Keywords automatically extracted from the title.
EUV光源

About EUV光源

, 
Sn

About Sn

, 
Xe

About Xe

, 
イオン

About イオン

, 
放射

About 放射

, 
スペクトル

About スペクトル

, 
理論

About 理論

, 
シミュレーション

About シミュレーション


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