High Performance Drilling of Monocrystalline Silicon Using Monocrystalline Diamond Drill

YOKOMIZO SEIICHI; KUBOTA SHIN'ICHIRO; UNO YOSHIYUKI

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J-GLOBAL ID：200902229309651161 Reference number：06A0117662

High Performance Drilling of Monocrystalline Silicon Using Monocrystalline Diamond Drill

単結晶ダイヤモンドドリルを用いた単結晶シリコンの高品位穴加工

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Material：
Volume： 72 Issue： 2 Page： 234-238 Publication year： Feb. 05, 2006
JST Material Number： F0268B ISSN： 1348-8716 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Manufacturing technology of solid-state devices , Other cutting

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