Art

J-GLOBAL ID：200902234443557400   Reference number：08A0646210

Pure-tin microdroplets irradiated with double laser pulses for efficient and minimum-mass extreme-ultraviolet light source production

二重レーザパルス照射した純錫微液滴による効率的且つ最小質量の極端紫外光源の作製

Author (14)： FUJIOKA Shinsuke (Inst. of Laser Engineering, Osaka Univ., 2-6 Yamada-Oka, Suita, Osaka, 565-0871 Japan) ,  SHIMOMURA Masashi (Inst. of Laser Engineering, Osaka Univ., 2-6 Yamada-Oka, Suita, Osaka, 565-0871 Japan) ,  SHIMADA Yoshinori (Inst. for Laser Technol., 2-6 Yamada-Oka, Suita, Osaka, 565-0871 Japan) ,  MAEDA Shinsuke (Inst. of Laser Engineering, Osaka Univ., 2-6 Yamada-Oka, Suita, Osaka, 565-0871 Japan) ,  SAKAGUCHI Hirokazu (Inst. of Laser Engineering, Osaka Univ., 2-6 Yamada-Oka, Suita, Osaka, 565-0871 Japan) ,  NAKAI Yuki (Inst. of Laser Engineering, Osaka Univ., 2-6 Yamada-Oka, Suita, Osaka, 565-0871 Japan) ,  AOTA Tatsuya (Inst. of Laser Engineering, Osaka Univ., 2-6 Yamada-Oka, Suita, Osaka, 565-0871 Japan) ,  NISHIMURA Hiroaki (Inst. of Laser Engineering, Osaka Univ., 2-6 Yamada-Oka, Suita, Osaka, 565-0871 Japan) ,  OZAKI Norimasa (Graduate School of Engineering, Osaka Univ., Suita, Osaka, 565-0871 Japan) ,  SUNAHARA Atsushi (Inst. for Laser Technol., 2-6 Yamada-Oka, Suita, Osaka, 565-0871 Japan) ,  NISHIHARA Katsunobu (Inst. of Laser Engineering, Osaka Univ., 2-6 Yamada-Oka, Suita, Osaka, 565-0871 Japan) ,  MIYANAGA Noriaki (Inst. of Laser Engineering, Osaka Univ., 2-6 Yamada-Oka, Suita, Osaka, 565-0871 Japan) ,  IZAWA Yasukazu (Inst. of Laser Engineering, Osaka Univ., 2-6 Yamada-Oka, Suita, Osaka, 565-0871 Japan) ,  MIMA Kunioki (Inst. of Laser Engineering, Osaka Univ., 2-6 Yamada-Oka, Suita, Osaka, 565-0871 Japan)
Material： Applied Physics Letters  (Appl Phys Lett)
Volume： 92  Issue： 24  Page： 241502  Publication year： Jun. 16, 2008 
JST Material Number： H0613A  ISSN： 0003-6951  CODEN： APPLAB  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： *extreme ultraviolet ,  light source ,  energy conversion efficiency ,  thermal expansion ,  droplet ,  laser pulse ,  tin ,  *photolithography ,  *pulsed laser irradiation
Semi thesaurus term： 微液滴 ,  Sn

JST classification (1)： Manufacturing technology of solid-state devices  (NC03030V)

Terms in the title (7)： レーザ ,  パルス照射 ,  錫 ,  液滴 ,  質量 ,  極端紫外光源 ,  作製