Novel Abrasive-Free Planarization of 4H-SiC (0001) Using Catalyst

HARA Hideyuki; SANO Yasuhisa; MIMURA Hidekazu; ARIMA Kenta; KUBOTA Akihisa; YAGI Keita; MURATA Junji; YAMAUCHI Kazuto

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J-GLOBAL ID：200902235225088429 Reference number：06A0741754

Novel Abrasive-Free Planarization of 4H-SiC (0001) Using Catalyst

触媒を用いて4H-SiC(0001)の研磨材を使用しない斬新な平坦化処理

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Material：
Volume： 35 Issue： 8 Page： L11-L14 Publication year： Aug. 2006
JST Material Number： D0277B ISSN： 0361-5235 Document type： Article
Article type：短報 Country of issue： United States (USA) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices

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