Nanometric lateral scale development using an atomic force microscope with directly traceable laser interferometers

MISUMI I; GONDA S; SATO O; SUGAWARA K; YOSHIZAKI K; KUROSAWA T; TAKATSUJI T

Art

J-GLOBAL ID：200902243295998174 Reference number：06A0594489

Nanometric lateral scale development using an atomic force microscope with directly traceable laser interferometers

直接追跡可能レーザ干渉計付き原子間力顕微鏡を用いたナノ計測横方向スケールの開発

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Material：
Volume： 17 Issue： 7 Page： 2041-2047 Publication year： Jul. 2006
JST Material Number： C0354C ISSN： 0957-0233 CODEN： MSTCEP Document type： Article
Article type：原著論文 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Units,standards,primary standards,constants , Measuring methods and instruments of length,area,cross section,volume,angle

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