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J-GLOBAL ID：200902246083485001   Reference number：05A0564405

Carrier separation analysis for clarifying carrier conduction and degradation mechanisms in high-k stack gate dielectrics

高誘電率スタックゲート誘電体におけるキャリア伝導および劣化の機構解明のためのキャリア分離解析

Author (13)： MIZUBAYASHI Wataru (Advanced Semiconductor Res. Center (ASRC), National Inst. of Advanced Industrial Sci. and Technol. (AIST), Tsukuba, JPN) ,  YASUDA Naoki (MIRAI Project, Assoc. of Super-Advanced Electronics Technol.s (ASET), Tsukuba, JPN) ,  OKADA Kenji (MIRAI Project, Assoc. of Super-Advanced Electronics Technol.s (ASET), Tsukuba, JPN) ,  OTA Hiroyuki (Advanced Semiconductor Res. Center (ASRC), National Inst. of Advanced Industrial Sci. and Technol. (AIST), Tsukuba, JPN) ,  HISAMATSU Hirokazu (MIRAI Project, Assoc. of Super-Advanced Electronics Technol.s (ASET), Tsukuba, JPN) ,  IWAMOTO Kunihiko (MIRAI Project, Assoc. of Super-Advanced Electronics Technol.s (ASET), Tsukuba, JPN) ,  TOMINAGA Koji (MIRAI Project, Assoc. of Super-Advanced Electronics Technol.s (ASET), Tsukuba, JPN) ,  YAMAMOTO Katsuhiko (MIRAI Project, Assoc. of Super-Advanced Electronics Technol.s (ASET), Tsukuba, JPN) ,  HORIKAWA Tsuyoshi (Advanced Semiconductor Res. Center (ASRC), National Inst. of Advanced Industrial Sci. and Technol. (AIST), Tsukuba, JPN) ,  NABATAME Toshihide (MIRAI Project, Assoc. of Super-Advanced Electronics Technol.s (ASET), Tsukuba, JPN) ,  SATAKE Hideki (MIRAI Project, Assoc. of Super-Advanced Electronics Technol.s (ASET), Tsukuba, JPN) ,  TORIUMI Akira (Advanced Semiconductor Res. Center (ASRC), National Inst. of Advanced Industrial Sci. and Technol. (AIST), Tsukuba, JPN) ,  TORIUMI Akira (The Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, JPN)
Material： Microelectronics Reliability  (Microelectronics and Reliability)
Volume： 45  Issue： 7-8  Page： 1041-1050  Publication year： Jul. 2005 
JST Material Number： C0530A  ISSN： 0026-2714  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Thesaurus term： *MOSFET ,...
Semi thesaurus term： carrier ,...

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JST classification (3)： Transistors  (NC03070N) ,  Oxide thin films  (BK14050P) ,  Measurement,testing and reliability of solid-state devices  (NC03040G)

Terms in the title (6)： 高誘電率 ,  スタック ,  ゲート誘電体 ,  キャリア ,  伝導 ,  分離解析