Rchr
J-GLOBAL ID:200901052848915988
Update date: May. 09, 2020
Mizubayashi Wataru
ミズバヤシ ワタル | Mizubayashi Wataru
Affiliation and department:
National Institute of Advanced Industrial Science and Technology
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Homepage URL (1):
http://www.aist.go.jp/RESEARCHERDB/cgi-bin/worker_detail.cgi?call=namae&rw_id=W52205062
MISC (9):
還元雰囲気下でのゲート電極形成プロセスによるHfO2膜の初期絶縁破壊. シリコンテクノロジー. 2006. 82. 2. 45-49
還元雰囲気下でのゲート電極形成プロセスによるHfO2膜の初期絶縁破壊. 電子情報通信学会技術研究報告. 2006. 106. 108. 107-111
W Mizubayashi, N Yasuda, K Okada, H Ota, H Hisamatsu, K Iwamoto, K Tominaga, K Yamamoto, T Horikawa, T Nabatame, et al. Carrier separation analysis for clarifying carrier conduction and degradation mechanisms in high-k stack gate dielectrics. MICROELECTRONICS RELIABILITY. 2005. 45. 7-8. 1041-1050
A Toriumi, K Iwamoto, H Ota, M Kadoshima, W Mizubayashi, T Nabatame, A Ogawa, K Tominaga, T Horikawa, H Satake. Advantages of HfAlON gate dielectric film for advanced low power CMOS application. MICROELECTRONIC ENGINEERING. 2005. 80. 190-197
キャリア分離法を用いたhigh-k stackゲート絶縁膜のキャリア伝導及び絶縁性劣化機構の解析. 電気学会研究会論文. 2005. 19-24
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