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J-GLOBAL ID:200902253117547415   Reference number:04A0658197

A Method for Assembling Nano-Electromechanical Devices on Microcantilevers Using Focused Ion Beam Technology

集束イオンビーム技術を用いて微小カンチレバー上にナノ電気機械的デバイスを組み立てるための方法
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Volume: 43  Issue: 7B  Page: 4624-4628  Publication year: Jul. 30, 2004 
JST Material Number: G0520B  ISSN: 0021-4922  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Design,manufacturing,and components of robots 
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