Suppression of native oxide growth in sputtered TaN films and its application to Cu electroless plating

WANG Z; YAEGASHI O; SAKAUE H; TAKAHAGI T; SHINGUBARA S

Art

J-GLOBAL ID：200902257726882250 Reference number：03A0698017

Suppression of native oxide growth in sputtered TaN films and its application to Cu electroless plating

スパッタTaN膜における自然酸化物成長の抑制とそのCuの無電解メッキへの応用

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Material：
Volume： 94 Issue： 7 Page： 4697-4701 Publication year： Oct. 01, 2003
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIAU Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Thin films of other inorganic compounds , Manufacturing technology of solid-state devices

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