Isotope Effect of Penetration of Hydrogen and Deuterium into Silicon through Si/SiO<sub>2</sub> Interface

MURAKAMI Kouichi; FUKATA Naoki; FUKATA Naoki; ISHIOKA Kunie; KITAJIMA Masahiro; KITAJIMA Masahiro; UCHIDA Noriyuki; MORISAWA Kunitomo; MORIHIRO Haruhito; SHIRAKAWA Ryota; TSUJIMURA Masatoshi

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J-GLOBAL ID：200902259768128028 Reference number：09A1035288

Isotope Effect of Penetration of Hydrogen and Deuterium into Silicon through Si/SiO₂ Interface

Si/SiO₂界面を横切る水素および重水素のシリコン中への浸入に対する同位体効果

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Volume： 48 Issue： 9,Issue 1 Page： 091204.1-091204.4 Publication year： Sep. 25, 2009
JST Material Number： G0520B ISSN： 0021-4922 CODEN： JJAPB6 Document type： Article
Article type：原著論文 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Non-homogeneous flows

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Isotope Effect of Penetration of Hydrogen and Deuterium into Silicon through Si/SiO2 Interface

Isotope Effect of Penetration of Hydrogen and Deuterium into Silicon through Si/SiO₂ Interface