Art

J-GLOBAL ID：200902267843873799   Reference number：04A0876841

Preparation of Ti-Al-Si-N Nano-composite Films by Reactive Sputtering

ナノメータコンポジット材料 反応スパッタ法によるTi-Al-Si-Nナノコンポジット膜の作製

Author (7)： NOSE MASATERU (高岡短大) ,  SUZUKI HIROFUMI (富山大 大学院) ,  OKUMURA YOSHIO (大同工業 技術部) ,  HOMBO EIJI (富山県工技セ) ,  MAE TAKEHIKO (富山工高専) ,  ANADA HIROSHI (富山大 工) ,  NOGI KIYOSHI (大阪大 接合科研)
Material： 粉体および粉末冶金  (Journal of the Japan Society of Powder and Powder Metallurgy)
Volume： 51  Issue： 11  Page： 802-807  Publication year： Nov. 15, 2004 
JST Material Number： F0691A  ISSN： 0532-8799  CODEN： FOFUA2  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： ceramic coating ,...
Semi thesaurus term： carrier ,...

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JST classification (1)： Ceramic coating to metallic materials  (YC02050V)

Reference (15)：

• BULJAN, S. T. Wear and design of ceramic cutting tool materials. Wear. 1989, 133, 309-321
• SILVA, R. F. Resistance of Si_3N_4 ceramic tools to thermal and mechanical loading in cutting of iron alloys. Wear. 1991, 148, 69-89
• IKEDA, T. Phase formation and characterization of hard coatings in the Ti-Al-N system prepared by the cathodic arc ion plating method. Thin Solid Films. 1991, 195, 99-110
• ZHOU, M. Phase transition and properties of Ti-Al-N thin films prepared by r.f.-plasma assisted magnetron sputtering. Thin Solid Films. 1999, 339, 203-208
• HUGON, M. C. Narrow resonance profiling study of the oxidation of reractively sputtered Ti_<1-x>Al_xN films. Nuclear Instruments and Methods in Physics Research, B. 2000, 161-163, 578-583

Terms in the title (7)： ナノメータ ,  コンポジット材料 ,  スパッタ法 ,  Ti-Al ,  Si ,  ナノコンポジット膜 ,  作製