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J-GLOBAL ID:200902267843873799   Reference number:04A0876841

Preparation of Ti-Al-Si-N Nano-composite Films by Reactive Sputtering

ナノメータコンポジット材料 反応スパッタ法によるTi-Al-Si-Nナノコンポジット膜の作製
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Volume: 51  Issue: 11  Page: 802-807  Publication year: Nov. 15, 2004 
JST Material Number: F0691A  ISSN: 0532-8799  CODEN: FOFUA2  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Ceramic coating to metallic materials 

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