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CMOS Integrated MEMS Resonator for RF Applications
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About URANGA A.
About Univ. Autonoma de Barcelona, Barcelona, ESP
About TEVA J.
About Univ. Autonoma de Barcelona, Barcelona, ESP
About VERD J.
About Univ. Autonoma de Barcelona, Barcelona, ESP
About LOPEZ J. L.
About Univ. Autonoma de Barcelona, Barcelona, ESP
About TORRES F.
About Univ. Autonoma de Barcelona, Barcelona, ESP
About ABADAL G.
About Univ. Autonoma de Barcelona, Barcelona, ESP
About BARNIOL N.
About Univ. Autonoma de Barcelona, Barcelona, ESP
About ESTEVE J.
About Centro Nacional de Microelectronica, Barcelona, ESP
About PEREZ-MURANO F.
About Centro Nacional de Microelectronica, Barcelona, ESP
Material：
About IEEE International Symposium on Circuits and Systems
Volume： 2006 Vol.5 Page： 2301-2304 Publication year： 2006
JST Material Number： A0757A ISSN： 0271-4302 Document type： Proceedings
Article type： 原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)
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About micro circuit technique
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All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
About CMOS process
Category name(code) classified by JST.
About Resonator
About Manufacturing technology of solid-state devices
About Semiconductor integrated circuit
Keywords automatically extracted from the title.
About Rf
About 応用
About CMOS
About 集積化
About MEMS共振器
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