About DENPOH K
About Tokyo Electron AT Ltd., Nirasaki, JPN
About WAKAYAMA G
About Tohoku Univ., Sendai, JPN
About NANBU K
About Tohoku Univ., Sendai, JPN
About Japanese Journal of Applied Physics. Part 1. Regular Papers, Short Notes & Review Papers
About plasma sheath
About 容量結合プラズマ
About Plasma in general
About 二周波数
About 容量結合プラズマ
About シース
About モデル