Art
J-GLOBAL ID：200902284114320250
Reference number：05A0996476
Electrical Characterization of Germanium Oxide/Germanium Interface Prepared by Electron-Cyclotron-Resonance Plasma Irradiation
電子サイクロトロン共鳴プラズマ照射により調製した酸化ゲルマニウム/ゲルマニウム界面の電気的特性評価
-
Publisher site
Copy service
{{ this.onShowCLink("http://jdream3.com/copy/?sid=JGLOBAL&noSystem=1&documentNoArray=05A0996476©=1") }}
-
Access JDreamⅢ for advanced search and analysis.
{{ this.onShowJLink("http://jdream3.com/lp/jglobal/index.html?docNo=05A0996476&from=J-GLOBAL&jstjournalNo=G0520B") }}
Author (4)：
,
,
,
Material：
Volume：
44
Issue：
9B
Page：
6981-6984
Publication year：
Sep. 30, 2005
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
,...
JST classification (1)：
JST classification
Category name(code) classified by JST.
Dielectrics in general
Reference (13)：
-
1) K. Rim, S. Koester, M. Hargrove, J. Chu, P. M. Mooney, J. Ott, T. Kanarsky, P. Ronsheim, M. Ieong, A. Grill and H.-S. P. Wong: Proc. 2001 Symp. VLSI Technology (2001) p. 59.
-
2) G. Hock, E. Kohn, C. Rosenblad, H. von Kanel, H.-J. Herzog and U. Konig: Appl. Phys. Lett. 76 (2000) 3920.
-
3) H. Shang, H. Okorn-Schimdt, J. Ott, P. Kozlowski, S. Steen, E. C. Jones, H.-S. P. Wong and W. Hanesch: IEEE Electron Device Lett. 24 (2003) 242.
-
4) H. Shang, K.-L. Lee, P. Kozlowski, C. D’Emic, I. Babich, E. Sikorski, M. Ieong, H.-S. P. Wong, K. Guarini and W. Hanesch: IEEE Electron Device Lett. 25 (2004) 135.
-
5) J.-P. Han, E. M. Vogel, E. P. Gusev, C. D’Emic, C. A. Richter, D. W. Heh and J. S. Suehle: IEEE Electron Device Lett. 25 (2004) 126.
ｍore...
Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
,
,
,
,
,
,
Return to Previous Page
