Mat
J-GLOBAL ID：200909007112198131
JST material number (FULL)：K20070209I
JST material number：K20070209
Chemical-Mechanical Planarization - Integration, Technology and Reliability
JST material number：
JST material number
Identifier of Material (journals)
K20070209
ISBN (1)：
1-55899-820-9
Series title (1)：
- Materials Research Society Symposium Proceedings 867
Material type：Proceedings, Print, zz
Publication frequency： zz
Country of issued：United States(USA)
Language (1)：
English(EN)
Publisher：
Materials Research Society
Publication place：Warrendale, Pa.
Conference name (1)：
- Symposium on Chemical-Mechanical Planarization - Integration, Technology and Reliability, San Francisco, Calif., 20050328 - 20050331
JST library information (0)
※：
※Subject to change. Contact us for the latest status.
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