J-GLOBAL ID:200909069314358292   JST material number (FULL):K19910557D   JST material number:K19910557

Proceedings of the 6th Symposium on Automated Integrated Circuits Manufacturing, 1990

JST material number:
JST material number
Identifier of Material (journals)
Series title  (1):
  • Proceedings. Electrochemical Society 91-5
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1): English(EN)
Editor/ Editing house (2): Electrochemical Society. Electronics Div. ,  Electrochemical Society. Dielectric Science and Technology Div.
Publisher: Electrochemical Society
Publication place:Pennington, N.J.
Conference name  (1):
  • Symposium on Automated Integrated Circuits Manufacturing, 6th, Seattle, Wash., 19901016 - 19901018
JST library information (0)

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