Art

J-GLOBAL ID：201002202437162810   Reference number：10A0847455

Fabrication of Microcoils with Narrow and High Aspect Ratio Coil Line

狭小で大アスペクト比のコイルライン付きマイクロコイルの製造

Author (2)： NODA Daiji (Univ. Hyogo, Hyogo, JPN) ,  HATTORI Tadashi (Univ. Hyogo, Hyogo, JPN)
Material： Advanced Robotics  (Adv Robot)
Volume： 24  Issue： 10  Page： 1461-1470  Publication year： 2010 
JST Material Number： T0339A  ISSN： 0169-1864  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Thesaurus term： microrobot ,  *microactuator ,  *solenoid coil ,  *micromachining ,  grooving(machining) ,  metallization(IC) ,  X ray lithography ,  etching

JST classification (3)： LCR parts  (NA05030D) ,  Design,manufacturing,and components of robots  (IC04013A) ,  Manufacturing technology of solid-state devices  (NC03030V)

Reference (11)：

• BECKER, E. W. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding. Microelectron. Eng. 1986, 4, 35-56
• BISCHOFBERGER, R. Low-cost MARMS process. Sensors Actuators A. 1997, 61, 392-399
• HIRATA, Y. LIGA process-micromachining technique using synchrotron radiation lithography-and some industrial applications. Nucl. Instrum. Methods B. 2003, 208, 21-26
• MEKARU, H. Development of three-dimensional LIGA process to fabricate spiral microcoil. Jpn. J. Appl. Phys. 2005, 44, 5749-5754
• MALEK, C. K. Applications of LIGA technology to precision manufacturing of high-aspect-ratio micro-components and-systems. Microelectron. J. 2004, 35, 131-143

Terms in the title (2)： アスペクト比 ,  マイクロコイル