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J-GLOBAL ID：201002203662989615   Reference number：10A0375072

The relationship between IY(Y=Hα)/(I*SiH)2 and crystalline volume fraction in microcrystalline silicon growth

微結晶シリコン成長におけるIHα/(I*SiH)2と結晶の体積分率の関係
Author (9)：
CHANTANA Jakapan

About CHANTANA Jakapan

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN

, 
HIGUCHI Takuya

About HIGUCHI Takuya

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN

, 
NAGAI Tomoyuki

About NAGAI Tomoyuki

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN

, 
SASAKI Shota

About SASAKI Shota

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN

, 
SOBAJIMA Yasushi

About SOBAJIMA Yasushi

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN

, 
TOYAMA Toshihiko

About TOYAMA Toshihiko

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN

, 
SADA Chitose

About SADA Chitose

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN

, 
MATSUDA Akihisa

About MATSUDA Akihisa

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN

, 
OKAMOTO Hiroaki

About OKAMOTO Hiroaki

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN


Material：
Physica Status Solidi. A. Applications and Materials Science  (Physica Status Solidi. A.)

About Physica Status Solidi. A. Applications and Materials Science


Volume： 207  Issue： 3  Page： 587-590  Publication year： Mar. 2010 
JST Material Number： D0774A  ISSN： 1862-6300  CODEN： PSSABA  Document type： Article
Article type： 原著論文  Country of issue： Germany, Federal Republic of (DEU)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
silicon

About silicon

, 
microcrystal

About microcrystal

, 
semiconductor thin film

About semiconductor thin film

, 
*plasma CVD

About plasma CVD

, 
plasma diagnostics

About plasma diagnostics

, 
emission spectrometry

About emission spectrometry

, 
*crystallinity

About crystallinity

, 
hydrogen

About hydrogen

, 
silane

About silane

, 
radiant intensity

About radiant intensity

, 
*plasma spectroscopy

About plasma spectroscopy

, 
emission spectrum

About emission spectrum

, 
thin film growth

About thin film growth


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
monosilane

About monosilane

, 
atomic hydrogen

About atomic hydrogen

, 
emission intensity

About emission intensity

, 
*microcrystalline silicon

About microcrystalline silicon


JST classification (2)：
JST classification
Category name(code) classified by JST.
Semiconductor thin films 
(BK14040E)

About Semiconductor thin films

,  Plasma diagnostics 
(BJ02090L)

About Plasma diagnostics

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
微結晶シリコン

About 微結晶シリコン

, 
成長

About 成長

, 
IH

About IH

, 
結晶

About 結晶

, 
体積分率

About 体積分率


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