About ISHIYAMA Chiemi
About Tokyo Inst. of Technol., Yokohama, JPN
About SHIBATA Akinobu
About Tokyo Inst. of Technol., Yokohama, JPN
About SONE Masato
About Tokyo Inst. of Technol., Yokohama, JPN
About HIGO Yakichi
About Tokyo Inst. of Technol., Yokohama, JPN
About Japanese Journal of Applied Physics
About photoresist
About aspect ratio
About nanostructure
About columnar crystal
About substrate (plate)
About silicon
About adhesive strength
About tensile strength
About semiconductor
About photoresist SU-8
About mechanical property
About strength
About SU-8
About Mechanical properties of solids in general
About 曲げ
About マイクロ
About サイズ
About カラム
About ケイ素基板
About 接着強度
About フォトレジストパターン