Art
J-GLOBAL ID:201002274240875158   Reference number:10A0700802

Effects of Aspect Ratio of Photoresist Patterns on Adhesive Strength between Microsized SU-8 Columns and Silicon Substrate under Bend Loading Condition

曲げ負荷条件でのマイクロサイズSU-8カラムとケイ素基板との接着強度に及ぼすフォトレジストパターンのアスペクト比の効果
Author (4):
Material:
Volume: 49  Issue: 6,Issue 2  Page: 06GN14.1-06GN14.5  Publication year: Jun. 25, 2010 
JST Material Number: G0520B  ISSN: 0021-4922  CODEN: JJAPB6  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
Thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.

Semi thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.

JST classification (1):
JST classification
Category name(code) classified by JST.
Mechanical properties of solids in general 
Reference (20):
more...

Return to Previous Page