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J-GLOBAL ID:201002291875175430   Reference number:10A0679026

Evaluation of Pick-up Performance on Semiconductor Manufacturing Using an Adhesive Tape

粘接着テープを用いた半導体製造工程におけるピックアップ性能評価
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Volume: 76  Issue: 766  Page: 730-736  Publication year: Jun. 25, 2010 
JST Material Number: F0227B  ISSN: 0387-5008  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Semiconductor integrated circuit  ,  Rubber and plastic materials 
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