Art

J-GLOBAL ID：201102205725013370   Reference number：11A0162484

Fabrication of Dot-like Nano-protrusions on Silicon Surfaces Using Nanosecond Pulse Nd:YAG Laser Irradiation

ナノ秒パルスNd:YAGレーザ照射を用いたシリコン表面上へのドット状ナノ突起の作製

Author (5)： YOSHIDA Yutaka (Hokkaido Univ., Hokkaido, JPN) ,  YATSU Shigeo (Hokkaido Univ., Hokkaido, JPN) ,  WATANABE Seiichi (Hokkaido Univ., Hokkaido, JPN) ,  KAWAI Masayoshi (KEK, Tsukuba, JPN) ,  KATO Takahiko (Hitachi, Ltd., Ibaraki, JPN)
Material： Transactions of the Japan Institute of Electronics Packaging  (Trans Jpn Inst Electron Packag)
Volume： 3  Issue： 1  Page： 57-61  Publication year： Dec. 24, 2010 
JST Material Number： L7297A  ISSN： 1883-3365  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： Nd-YAG laser ,  *laser irradiation ,  *surface roughness ,  *uplift (phenomenon) ,  *silicon ,  circular cone ,  self-organizing ,  *nanostructure ,  circuit pattern generation ,  scanning electron microscope ,  transmission electron microscope ,  nanodot
Semi thesaurus term： protrusion

JST classification (1)： Materials of solid-state devices  (NC03020K)

Reference (14)：

• M. Birnbaum, “SEMICONDUCTOR SURFACE DAMAGE PRODUCED BY RUBY LASERS,”Journal of Applied Physics, Vol.36, p. 3688, 1965.
• J. E. Sipe, J. F. Young, J. S. Preston, and H. M. Vandriel, “LASER-INDUCED PERIODIC SURFACE-STRUCTURE.1. THEORY,”Physical Review B, Vol.27, pp. 1141-1154, 1983.
• J. F. Young, J. S. Preston, J. E. Sipe, and H. M. Vandriel, “TIME-RESOLVED EVOLUTION OF LASER-INDUCED PERIODIC SURFACE-STRUC-TURE ON GERMANIUM,”Physical Review B, Vol.27, pp. 1424-1427, 1983.
• A. J. Pedraza, J. D. Fowlkes, and Y. F. Guan, “Surface nanostructuring of silicon,”Applied Physics a-Materials Science & Processing, Vol.77, pp. 277-284, Jul 2003.
• A. J. Pedraza, J. D. Fowlkes, and D. H. Lowndes, “Silicon microcolumn arrays grown by nanosecond pulsed-excimer laser irradiation,”Applied Physics Letters, Vol.74, pp. 2322-2324, Apr 19 1999.

Terms in the title (7)： ナノ秒パルス ,  Nd ,  YAGレーザ ,  シリコン ,  ドット ,  突起 ,  作製