Art

J-GLOBAL ID：201202284873378609   Reference number：12A1712028

Growth of Fe cubical particles on substrates during gas flow sputtering

気体流スパッタリング時の基板上のFe立方体粒子の成長

Author (5)： SAKUMA Hiroshi (Dep. of Electrical and Electronic Systems Engineering, Utsunomiya Univ., 7-1-2 Yoto, Utsunomiya 321-8585, JPN) ,  SAKAMOTO Shinichi (Dep. of Electrical and Electronic Systems Engineering, Utsunomiya Univ., 7-1-2 Yoto, Utsunomiya 321-8585, JPN) ,  NAOI Akimasa (Dep. of Electrical and Electronic Systems Engineering, Utsunomiya Univ., 7-1-2 Yoto, Utsunomiya 321-8585, JPN) ,  SAITO Yusuke (Dep. of Electrical and Electronic Systems Engineering, Utsunomiya Univ., 7-1-2 Yoto, Utsunomiya 321-8585, JPN) ,  ISHII Kiyoshi (Dep. of Electrical and Electronic Systems Engineering, Utsunomiya Univ., 7-1-2 Yoto, Utsunomiya 321-8585, JPN)
Material： Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films  (Journal of Vacuum Science and Technology. A. Vacuum, Surfaces, and Films)
Volume： 30  Issue： 6  Page： 061604-061604-6  Publication year： Nov. 2012 
JST Material Number： C0789B  ISSN： 0734-2101  CODEN： JVTAD6  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： sputtering ,  gas flow ,  *crystal growth ,  *fine particle ,  polyhedron ,  kinetic energy ,  Iron ,  *nucleation ,  grain coarsening ,  *grain growth ,  energy ,  mechanical quantity ,  modification

JST classification (1)： Crystal growth of metals  (BK13030M)

Terms in the title (5)： 気体流 ,  スパッタリング ,  Fe ,  立方体 ,  成長