Art

J-GLOBAL ID：201302289878121060   Reference number：13A1337379

硬質炭素膜のトライボロジー DLC膜の製造技術の変遷と動向

Author (1)： OHARA HISANORI (日本アイ・ティ・エフ 技術開発セ)
Material： トライボロジスト  (Journal of Japanese Society of Tribologists)
Volume： 58  Issue： 8  Page： 545-550  Publication year： Aug. 15, 2013 
JST Material Number： F0390A  ISSN： 0915-1168  CODEN： TORAEO  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： *DLC film ,  *diamond-like carbon ,  *technical history ,  ion beam deposition ,  laser ablation ,  plasma CVD ,  sputtered deposition ,  ion plating ,  phase diagram ,  *production method ,  mechanical property ,  *tribology ,  wear characteristics ,  chemical property ,  electrical property ,  optical property
Semi thesaurus term： *research direction ,  ternary phase diagram ,  friction property

JST classification (2)： Lubrication in general  (QB02010S) ,  Carbon and its compounds  (YB02060D)

Reference (31)：

• ANGUS, J. C. Growth of Diamond Seed Crystals by Vapor Deposition. J. Appl. Phys. 1968, 39, 6, 2915
• DERYAGIN, B. V. Epitaxial Synthesis of Diamond inn the Metastable Region. Rus. Chem. Rev. 1970, 39, 9, 783
• MATSUMOTO, S. Vapor Deposition of Diamond Particles from Methane. Jpn. J. Appl. Phys. 1982, 21, part 2, L183
• TSAI, H-C. Critical Review, Characterization of Diamondlike Carbon Films and Their Application as Overcoats on Thin Film Media for Magnetic Recording. J. Vac. Sci. Technol., A. 1987, 5, 6, 3287
• ANGUS, J. C. Diamond and Diamond-Like Films. Thin Solid Films. 1992, 216, 1, 126

Terms in the title (4)： 硬質炭素膜 ,  トライボロジー ,  DLC膜 ,  動向