Art

J-GLOBAL ID：201402223852464098   Reference number：14A0444163

Low-temperature synthesis of diamond films by photoemission-assisted plasma-enhanced chemical vapor deposition

光電子放出支援プラズマ増強化学蒸着によるダイヤモンド膜の低温合成

Author (6)： KAWATA Mayuri (Inst. of Multidisciplinary Res. for Advanced Materials, Tohoku Univ., 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, JPN) ,  OJIRO Yoshihiro (Inst. of Multidisciplinary Res. for Advanced Materials, Tohoku Univ., 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, JPN) ,  OGAWA Shuichi (Inst. of Multidisciplinary Res. for Advanced Materials, Tohoku Univ., 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, JPN) ,  MASUZAWA Tomoaki (International Christian Univ., 3-10-2 Osawa, Mitaka 181-8585, JPN) ,  OKANO Ken (International Christian Univ., 3-10-2 Osawa, Mitaka 181-8585, JPN) ,  TAKAKUWA Yuji (Inst. of Multidisciplinary Res. for Advanced Materials, Tohoku Univ., 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, JPN)
Material： Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films  (Journal of Vacuum Science and Technology. A. Vacuum, Surfaces, and Films)
Volume： 32  Issue： 2  Page： 02B110-02B110-9  Publication year： Mar. 2014 
JST Material Number： C0789B  ISSN： 0734-2101  CODEN： JVTAD6  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： *photoemission ,  *plasma CVD ,  *thin film ,  chemical synthesis ,  glow discharge ,  ion collision
Semi thesaurus term： *diamond film ,  plasma-enhanced chemical vapor deposition ,  Low-temperature synthesis

JST classification (2)： Interactions with ions  (BK16070Z) ,  Photoemission and photoelectrons  (BM09030D)

Terms in the title (5)： 光電子放出 ,  支援 ,  プラズマ増強化学蒸着 ,  ダイヤモンド膜 ,  低温合成