Art
J-GLOBAL ID:201402242025013781   Reference number:14A1021800

集束陽子線描画による三次元柔構造デバイスの創出,統合および超実装工学の推進

Author (16):
Material:
Volume: 2013  Page: 348-359  Publication year: Jun. 30, 2014 
JST Material Number: L8168B  ISSN: 2185-7326  Document type: Article
Country of issue: Japan (JPN)  Language: JAPANESE (JA)

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