Art

J-GLOBAL ID：201502206864689822   Reference number：15A0900489

Free-standing subwavelength grid infrared cut filter of 90mm diameter for LPP EUV light source

LPP EUV光源のための直径90mmの自立サブ波長格子赤外線カットフィルタ

Author (7)： SUZUKI Yukio (Micro System Integration Center, Tohoku Univ., 519-1176, Aza Aoba, Aramaki Aoba-ku, Sendai 980-0845, JPN) ,  SUZUKI Yukio (Graduate School of Engineering, Tohoku Univ., 6-6-01, Aza Aoba, Aramaki Aoba-ku, Sendai 980-8579, JPN) ,  TOTSU Kentaro (Micro System Integration Center, Tohoku Univ., 519-1176, Aza Aoba, Aramaki Aoba-ku, Sendai 980-0845, JPN) ,  MORIYAMA Masaaki (Micro System Integration Center, Tohoku Univ., 519-1176, Aza Aoba, Aramaki Aoba-ku, Sendai 980-0845, JPN) ,  MORIYAMA Masaaki (Graduate School of Engineering, Tohoku Univ., 6-6-01, Aza Aoba, Aramaki Aoba-ku, Sendai 980-8579, JPN) ,  ESASHI Masayoshi (Micro System Integration Center, Tohoku Univ., 519-1176, Aza Aoba, Aramaki Aoba-ku, Sendai 980-0845, JPN) ,  TANAKA Shuji (Graduate School of Engineering, Tohoku Univ., 6-6-01, Aza Aoba, Aramaki Aoba-ku, Sendai 980-8579, JPN)
Material： Sensors and Actuators. A. Physical  (Sens Actuators A)
Volume： 231  Page： 59-64  Publication year： Jul. 15, 2015 
JST Material Number： B0345C  ISSN： 0924-4247  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： *periodic structure ,  *lattice ,  *infrared radiation ,  *filter ,  honeycomb structure ,  laser-produced plasma ,  light source ,  *subwavelength structure ,  EUV light source ,  plasma
Semi thesaurus term： laser produced plasma ,  extreme ultra-violet light source

JST classification (2)： Optical information processing  (BD03060T) ,  Optical devices in general  (BD06010L)

Terms in the title (5)： EUV光源 ,  直径 ,  自立 ,  サブ波長格子 ,  赤外線