Art
J-GLOBAL ID：201502218295480810
Reference number：15A1356692
Frequency scanning interferometry with nanometer precision using a vertical-cavity surface-emitting laser diode under scanning speed control
垂直共振器面発光レーザダイオードを用いる走査速度制御の下でのナノメートル精度の周波数走査型干渉測定
Author (1)：
Material：
Volume：
22
Issue：
6
Page：
869-874
Publication year：
Dec. 2015
JST Material Number：
U0709A
ISSN：
1349-9432
Document type：
Article
Article type：
原著論文
Country of issue：
Germany, Federal Republic of (DEU)
Language：
ENGLISH (EN)
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Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
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JST classification (3)：
JST classification
Category name(code) classified by JST.
Interferometry and interferometers
, Measuring methods and instruments of length,area,cross section,volume,angle
, Semiconductor lasers
Reference (17)：
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Tsai, M., Huang, H., Itoh, M., Yatagai, T.: Opt. Rev. 6, 449 (1999)
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Decker, J.E., Miles, J.R., Madej, A.A., Siemsen, R.F., Siemsen, K.J., de Bonth, S., Bustraan, K., Temple, S., Pekelsky, R.: Appl. Opt. 42, 5670 (2003)
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Dai, X., Seta, K.: Meas. Sci. Technol. 9, 1031 (1998)
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Bitou, Y., Seta, K.: Jpn. J. Appl. Phys. 39, 6084 (2000)
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Bitou, Y., Seta, K.: Jpn. J. Appl. Phys. 41, 384 (2002)
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Terms in the title (8)：
Terms in the title
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