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J-GLOBAL ID:201502218295480810   Reference number:15A1356692

Frequency scanning interferometry with nanometer precision using a vertical-cavity surface-emitting laser diode under scanning speed control

垂直共振器面発光レーザダイオードを用いる走査速度制御の下でのナノメートル精度の周波数走査型干渉測定
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Material:
Volume: 22  Issue:Page: 869-874  Publication year: Dec. 2015 
JST Material Number: U0709A  ISSN: 1349-9432  Document type: Article
Article type: 原著論文  Country of issue: Germany, Federal Republic of (DEU)  Language: ENGLISH (EN)
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All keywords is available on JDreamIII(charged).
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Category name(code) classified by JST.
Interferometry and interferometers  ,  Measuring methods and instruments of length,area,cross section,volume,angle  ,  Semiconductor lasers 

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