Art

J-GLOBAL ID：201502286183301870   Reference number：15A0440560

A polydimethylsiloxane diaphragm integrated with a sputtered thin film NdFeB magnet

スパッタされた薄膜のNdFeB磁石と一体化したポリジメチルシロキサンダイアフラム

Author (6)： ZHI Chao (Tokyo Inst. of Technol., Interdisciplinary Graduate School of Sci. and Engineering, Yokohama, JPN) ,  SHINSHI Tadahiko (Tokyo Inst. of Technol., Precision and Intelligence Lab., Mail Box: R2-38, 4259 Nagatsuta-cho, Midori-ku, 226-8503 ...) ,  UEHARA Minoru (Hitachi Metals, Ltd., Magnetic Materials Res. Lab., Osaka, JPN) ,  MATSUTANI Akihiro (Tokyo Inst. of Technol., Technical Dep., Semiconductor and MEMS Processing Center, Yokohama, JPN) ,  YUITO Isamu (Waseda Univ., Inst. for Nanoscience and Nanotechnology, Tokyo, JPN) ,  TAKEUCHI Teruaki (Waseda Univ., Inst. for Nanoscience and Nanotechnology, Tokyo, JPN)
Material： Microsystem Technologies  (Microsystem Technologies. Micro- and Nanosystems, Information Storage and Processing Systems)
Volume： 21  Issue： 3  Page： 675-681  Publication year： Mar. 2015 
JST Material Number： W2056A  ISSN： 0946-7076  Document type： Article
Article type： 原著論文  Country of issue： Germany, Federal Republic of (DEU)  Language： ENGLISH (EN)

Thesaurus term： *permanent magnet ,  *polydimethylsiloxane ,  *diaphragm(machine element) ,  electric machine ,  micropump ,  *MEMS ,  wafer ,  etching
Semi thesaurus term： energy harvester ,  silicon substrate ,  *neodymium magnet

JST classification (1)： Manufacturing technology of solid-state devices  (NC03030V)

Terms in the title (4)： スパッタ ,  薄膜 ,  NdFeB ,  磁石