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J-GLOBAL ID:201602239743745484   Reference number:16A0477220

マイクロチャネル内面への非晶質炭素膜の成膜

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Material:
Volume: 2016  Issue: 春  Page: ROMBUNNO.E25  Publication year: 2016 
JST Material Number: Y0047C  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Lubrication in general  ,  Techniques and equipment of thin film deposition 
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