Art

J-GLOBAL ID：201702216176355662   Reference number：17A1220967

Fabrication of hydrogenated amorphous silicon carbide films by decomposition of hexamethyldisilane with microwave discharge flow of Ar

ヘキサメチルジシランの分解による水素化非晶質炭化ケイ素膜の作製

Author (6)： ITO Haruhiko (Nagaoka Univ. Technol., Niigata, JPN) ,  KUMAKURA Motoki (Nagaoka Univ. Technol., Niigata, JPN) ,  SUZUKI Tsuneo (Nagaoka Univ. Technol., Niigata, JPN) ,  NIIBE Masahito (Univ. Hyogo, Hyogo, JPN) ,  KANDA Kazuhiro (Univ. Hyogo, Hyogo, JPN) ,  SAITOH Hidetoshi (Nagaoka Univ. Technol., Niigata, JPN)
Material： Japanese Journal of Applied Physics  (JJAP)
Volume： 55  Issue： 6S2  Page： 06HC01.1-06HC01.9  Publication year： Jun. 2016 
JST Material Number： G0520B  ISSN： 0021-4922  CODEN： JJAPB6  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Thesaurus term： *silicon carbide ,  *membrane and film ,  *microwave discharge ,  *Rutherford back scattering ,  X-ray photoelectron spectroscopy ,  emission spectroscopy ,  *chemical composition ,  XANES ,  *hardness
Semi thesaurus term： X-ray absorption near edge structure ,  *amorphous film

JST classification (3)： Thin films of other inorganic compounds  (BK14060A) ,  Gas discharges  (BJ03020T) ,  Mechanical properties of solids in general  (BL01021C)

Substance index (1)： Hexamethyldisilane

Reference (37)：

• S. R. P. Silva, J. Robertson, W. I. Milne, and G. A. J. Amartunga, Amorphous Carbon: State of the Art (World Scientific, Singapore, 1998) p. 237.
• W. Kulisch, Deposition of Diamond-Like Superhard Materials (Springer, Berlin, 1999) Chap. 1.
• H. Yoshihara, H. Mori, and M. Kikuchi, Thin Solid Films 76, 1 (1981).
• L. Thomas, L. Main?, J. M. Badie, and M. Ducarroir, Surf. Coatings Technol. 142-144, 314 (2001).
• A. Soum-Glaude, L. Thomas, E. Tomasella, J. M. Badie, and R. Berjoan, Surf. Coatings Technol. 200, 855 (2005).

Terms in the title (7)： ヘキサメチルジシラン ,  分解 ,  水素化 ,  非晶質 ,  炭化 ,  ケイ素膜 ,  作製