High Frequency Type MEMS Ultrasonic Sensor Using P(VDF/TrFE) Thin Films

TANAKA TSUNEHISA; MURAKAMI SHUICHI; SATO KAZUO; UNO MAYUMI; YAMASHITA KAORU

Art

J-GLOBAL ID：201702219537091500 Reference number：17A0863896

High Frequency Type MEMS Ultrasonic Sensor Using P(VDF/TrFE) Thin Films

P(VDF/TrFE)薄膜を用いた高周波型MEMS超音波センサ

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Material：
Volume： PHS-17 Issue： 14-20 Page： 21-24 Publication year： Jun. 29, 2017
JST Material Number： L2897B Document type： Proceedings
Article type：原著論文 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Other applications of acoustics

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