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J-GLOBAL ID：201702231995367734   Reference number：17A0364013

Case studies of a planar piezoresistive vibration sensor: Measuring transient time history signal waves

平面ピエゾ抵抗振動センサの事例研究:過渡時間履歴信号波の測定【Powered by NICT】

Author (5)： Zhang Lan (Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8564, Japan) ,  Lu Jian (Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8564, Japan) ,  Kurashima Yuichi (Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8564, Japan) ,  Takagi Hideki (Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8564, Japan) ,  Maeda Ryutaro (Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8564, Japan)
Material： Microelectronic Engineering  (Microelectron Eng)
Volume： 165  Page： 27-31  Publication year： 2016 
JST Material Number： C0406B  ISSN： 0167-9317  CODEN： MIENEF  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： With the development of the ec...

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Thesaurus term： noise(signal) ,  civil engineering structure ,  *sensor ,  safety ,  response characteristic ,  random vibration ,  *case study ,  security
Semi thesaurus term： 産業応用 ,  実時間 ,  センサノード ,  低電力化 ,  時間履歴 ,  *振動センサ ,  *圧電抵抗 , 【Automatic Indexing@JST】

Author keywords (5)： Piezoresistive ,  Vibration sensor ,  Cavity first ,  Vapor HF ,  High responsivity

JST classification (3)： Semiconductor integrated circuit  (NC03162T) ,  Analytical instruments  (CC02020S) ,  Manufacturing technology of solid-state devices  (NC03030V)

Terms in the title (4)： ピエゾ抵抗 ,  振動センサ ,  研究 ,  時間履歴