Art

J-GLOBAL ID：201702235458710311   Reference number：17A0218009

触媒反応支援化学気相堆積法による酸化亜鉛薄膜の堆積

Author (5)： YASUI KANJI (長岡技科大) ,  TAJIMA RYOICHI (長岡技科大) ,  TERAGUCHI YUSUKE (長岡技科大) ,  SATOMOTO SOICHI (長岡技科大) ,  KATO TAKAHIRO (長岡技科大)
Material： 電子情報通信学会論文誌 C(Web)
Volume： J100-C  Issue： 1  Page： 8-15 (WEB ONLY)  Publication year： Jan. 01, 2017 
JST Material Number： U0472A  ISSN： 1881-0217  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： *catalytic reaction ,  *chemical vapor deposition ,  *zinc oxide ,  *crystallinity ,  enzyme reaction ,  Hydrogen ,  Platinum ,  nano particle ,  high temperature ,  water molecule ,  *thin film growth ,  dinitrogen oxide ,  *carrier mobility ,  platinum catalyst ,  crystal orientation ,  precursor (substance) ,  *photoluminescence ,  dependence ,  additive effect ,  *electric conduction ,  electron density ,  carrier density ,  X-Ray Diffraction ,  spectrum ,  temperature dependence ,  *electron mobility ,  film thickness dependence
Semi thesaurus term： photoluminescence spectrum

JST classification (2)： Oxide thin films  (BK14050P) ,  Manufacturing technology of solid-state devices  (NC03030V)

Reference (16)：

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• E.M. Kaidashev, M. Lorenz, H. von Wenckstern, A. Rahm, H.-C. Semmelhack, K.-H. Han, G. Benndorf, C. Bundesmann, H. Hochmuth, and M. Grundmann, “High electron mobility of epitaxial ZnO thin films on c-plane sapphire grown by multistep pulsed-laser deposition,” Appl. Phys. Lett., vol.82, pp.3901-3903, June 2003.

Terms in the title (5)： 触媒反応 ,  支援 ,  化学気相堆積 ,  酸化亜鉛薄膜 ,  堆積