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Electrostatic charge sensor based on micro resonator with sensing scheme of effective stiffness perturbation
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About Chen Dongyang
About The State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou 310027, People’s Republic of China
About Zhao Jiuxuan
About The State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou 310027, People’s Republic of China
About Wang Yinshen
About The State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou 310027, People’s Republic of China
About Xie Jin
About The State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou 310027, People’s Republic of China
Material：
About IEEE Conference Proceedings
Volume： 2017 Issue： MEMS Page： 1208-1211 Publication year： 2017
JST Material Number： W2441A Document type： Proceedings
Article type： 原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)
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Keywords indexed to the article.
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On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
About nonlinearity
About resonator
About perturbation
About linearity
About resonance frequency
About electric charge
About Energy Transfer
About tuning fork
About micro cavity
About frequency stability
About high sensitivity
About quality factor
About electrostatic force
About charge sensor
About effective rigidity
Category name(code) classified by JST.
About Resonator
About Manufacturing technology of solid-state devices
About Mechanical properties of solids in general
Keywords automatically extracted from the title.
About 有効剛性
About 摂動
About マイクロ共振器
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